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We describe the design, fabrication, and high vacuum packaging process of 2D scanner. The resonant frequencies of 2D scanner after packaged in vacuum are 30 kHz and 290 Hz for the inner mirror and the gimbal frame, respectively. The rotation angles of packaged 2D scanner are 25° and 16° at driving voltages of 20 V and 12 V for the inner mirror and the gimbal frame, respectively. To compromise the...
The electrostatically driven scanning micro mirrors are fabricated for the application to laser scanning display. However, a high voltage is needed for the operation. In order to operate mirror at a low voltage, we investigate the air friction loss of micro mirror with vertically driven comb in vacuum. Due to the operation in vacuum, the rotation angle increases by 52 times larger than that in atmospheric...
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