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In this work, we present the fabrication process of a large (100mmx40mm) and thick (30mm) single order diffraction grating with a very flat reflecting surface. This grating is designed for a soft X-ray monochromator. Three single order diffraction gratings with different line densities were integrated on one silicon plate. The gratings are patterned on a 6.35mm thick substrate using direct e-beam...
In this work, we present the fabrication process of a large area (100mm×40mm) and thick (30mm) single order diffraction grating for a 10–1000eV soft X-ray monochromator. Three types of diffraction gratings were integrated on one single piece of bulk silicon. The gratings were patterned on a 4 inch silicon wafer using direct e-beam writing with SAL-601. The wafer was etched and diced into a 100mm×40mm×0...
We theoretically propose a novel plasmonic laser based on the band edge modes of one-dimensional plasmonic crystal in an asymmetric dielectric environment. We find that the quality factors of the band edge modes are high and comparable to that of the collective resonances of surface plasmon in symmetric background. Moreover, surface plasmon lasing of single mode is numerically demonstrated with a...
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