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We present the design and implementation of an analog front-end for smart-sensors and measurement results with prototypes of acceleration micro-sensors. The technology used for sensor manufacturing features silicon nanowires as strain gauges. The proposed system supports Kelvin contacts scheme and sensor bias duty-cycling. A fully-differential amplifier with a sensor-degenerated common-mode rejection...
This work describes the implementation and the modeling of a convective accelerometer with 1st-order thermal ΣΔ readout. This closed-loop system is obtained by the hybrid combination of a CMOS sensor prototype which includes an amplifier, and discrete electronic devices. A high comparator precision is reached by dynamic offset cancellation of the amplifier. After a modeling of the Johnson noise and...
This work investigates the design of first-order thermal SigmaDelta modulators for calorimetric sensor applications. Considering the static resolution of the modulator, a set of equations is proposed for the calculation of system parameters. This work was achieved in the context of a convective accelerometer, and this particular sensor is used here as a case-study. We show that the modulator parameters...
This paper presents the study of an original closed-loop conditioning approach for fully-integrated convective inertial sensors. The method is applied to an accelerometer manufactured on a standard CMOS technology using an auto-aligned bulk etching step. Using the thermal behavior of the sensor as a summing function, a first order sigma-delta modulator is built. This ldquoelectrophysicalrdquo modulator...
We study thermal convective accelerometers manufactured on a low-cost standard CMOS technology. As a closed-loop conditioning approach, we applied the thermal sigma-delta modulation principle to the readout of these sensors. This design leads to a simple architecture with minimized analog electronics. In this work, we consider the design of an improved sensor and analyze its properties. We show that...
In this paper, we compare three different conditioning and readout electronics for CMOS convective accelerometers. The work is based on both characterization results and high-level simulations. The three following architectures are evaluated: (i) a simple amplifier, (ii) a chopper stabilized amplifier, and (iii) an innovative 1st-order thermal sigma-delta modulator. Experimental data are obtained...
This paper introduces an analytical modeling of a convection heat CMOS accelerometer. The modeling approach relies on the use of fundamental results and is validated using both experimental data issued from test vehicles and FEM analysis. Since such accelerometers are based on the CMOS technology, the proposed model is intended for further HDL integration. The objective is to enable system level simulation...
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