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This paper presents the first demonstration of an untethered legged microrobot walking at speeds greater than 5 body lengths/second. This work integrates contributions in multi-material robot leg design and microfabrication as well as high power actuation using an external magnetic field. The resulting 25 mg, 4 mm × 4 mm × 5 mm hexapedal robot has been measured walking at speeds in excess of 20 mm/sec,...
This work presents a method for folding 3D structures from planar microfabricated components using magnetics and an initial impulsive force. A scaling analysis demonstrates that magnetic folding can be particularly favorable at small scales and this analysis is validated through both a dynamic simulation and experimental results. Experimental results are provided by three planar-fabricated, multi-material,...
This work presents highly flexible elastomer and silicon micro robotic mechanisms actuated using embedded permanent magnets manipulated by an external magnetic field. The mechanisms are fabricated using a process to incorporate elastomer hinges and other features into silicon MEMS, and a method for embedding small magnets via press-fit into an elastomer sleeve. Fabricated mechanisms have demonstrated...
Characterizing the large strain behavior of Poly(methyl methacrylate) (PMMA) across its glass transition temperature is essential for modeling hot embossing. Its mechanical properties vary significantly across the glass transition as well as with strain rate. Several previous models have attempted to capture this behavior with limited success, and none have considered stress relaxation. In this work,...
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