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We report on miniaturized spectroscopic sensors that are realized using Silicon Photonics technology. This technology relies on CMOS compatible processes to fabricate both Silicon and Silicon-Nitride based photonics integrated circuits. Various spectroscopic sensor designs and applications are discussed.
Silicon and Silicon Nitride photonics arc on their way to open the route towards integrated on-chip spectropholometers, Cost, miniaturization, miniaturization, hut also performance advantages ace at the origin of their potential We will discuss several integrated on-chip spectropholometers that are on the eve of commercial lake up.
In this letter, we report a novel high-index-contrast silicon nitride arrayed waveguide grating (AWG) for very near-infrared wavelengths. This device is fabricated through a process compatible with a complementary metal–oxide–semiconductor fabrication line and is therefore suitable for mass fabrication. The large phase errors that usually accompany high-index-platform AWGs are partly mitigated through...
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