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A systematic protocol for filter passband correction, together with voltage-controlled frequency tuning provided by capacitive-gap transducers, has made possible a 4-res-onator micromechanical filter with a 0.1% bandwidth commensurate with the needs of channel-selection and an impressive 20-dB shape factor of 1.59. Indeed, a filter with this small a percent bandwidth would yield very poorly without...
A capacitive-comb transduced micromechanical resonator using aggressive lithography to occupy only 0.0154-mm2 of die area has been combined via bond-wiring with a custom ASIC sustaining amplifier and a supply voltage of only 1.65V to realize a 32.768-kHz real-time clock oscillator more than 100× smaller by area than miniaturized quartz crystal implementations and at least 4× smaller than other MEMS-based...
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