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This paper reports a novel fabrication method for multiscale fluidic channels ranging from sub-100 nm to a few μm in their hydraulic diameters, Dh, corresponding to a factor of ∼106 tunability in terms of cross-sectional area and exhibiting comparable height-to-width ratio (h/w or aspect ratio, AR) using conventional thermal oxidation and subsequent oxide etching based on self-assembled Silicon-on-Nothing...
This paper reports design, fabrication, and characterization of liquid metal-based microheaters. Liquid metal microheaters designed via finite element simulation were fabricated by simply injecting eutectic gallium indium into polydimethylsiloxane (PDMS) microfluidic chips bonded to either silicon or PDMS substrates. Considering the net positive volume change of the microheater upon heating, both...
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