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We present a robust wafer-scale top-down process for the fabrication of locally thinned-downed silicon nanowire (SiNW) devices. The fabrication is based on electron-beam lithography in combination with a two-step tetramethylammonium hydroxide (TMAH) wet etch. We optimized the etching profile of the TMAH process on silicon-on-insulator <100> using isopropanol additive and temperature regulation,...
The INGRID(Interactive Neutrino GRID) detector is designed to measure the neutrino beam direction with a precision better than 1mrad for T2K experiment. INGRID consists of 16 modules and placed around the beam center at 280m downstream of the proton beam target. The module is a sandwich of iron targets and scintillator tracking planes which consist of X–Y layers. We have constructed all scintillator...
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