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A large deformation mechanics model is applied to predict capacitance changes in an all-elastomer capacitive tactile sensor, and the predictive model is experimentally validated. The compressive model predicts a non-linear relationship between the contact normal force and resulting capacitance change due to changes in electrode gap and electrode layer thickness. Broad parametric studies demonstrate...
This work demonstrates an all-elastomer MEMS capacitive strain sensor with high dynamic range (5000∶1), and features an inexpensive molding microfabrication process. The sensor is comprised of conductive elastometric comb capacitors embedded in a dielectric. Two different sensor designs, lateral combs (LC) and transverse combs (TC), were developed to evaluate sensor sensitivity as a function of load...
This paper reports the first 3-axis (normal and shear force) all-elastomer capacitive MEMS tactile sensor. A multiphysics finite element model was developed and was used to tailor sensor geometry for high shear force sensitivity. Sensor area was 1.5 × 1.5 mm and used vertical capacitive structures with 20 µm electrode gaps to achieve high shear force sensitivities of 8.8 fF/N, shear force resolutions...
An all-elastomer microelectromechanical systems (MEMS) sensor to detect an applied normal force by measuring a change in capacitance was designed and fabricated; this is the first sensor of its kind to utilize in-plane conductive elastomer capacitors. Other works have demonstrated capacitive tactile sensors, but capacitors were oriented out-of-plane and often required more complex fabrication processes...
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