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A light-weight Wolter type-I telescope for future space X-ray observations is prototyped by using micromachining technologies. Curvilinear micro pores with a width of 20 $$\upmu$$ μ m are fabricated with deep reactive ion etching. Sidewalls of the pores are smoothed with high temperature annealing. Then, two wafers are deformed to different curvature radii, 1000 and 333 mm. The two wafers...
We have been developing novel ultra lightweight X-ray optics based on MEMS technologies, aiming at future space missions whose objectives include X-ray astronomy, planetary exploration, and Earth observation. Sidewalls of DRIE- micro pores through thin silicon wafers are used for X-ray mirrors. Recently, we built a prototype of a 4-inch Wolter type-I optic and fabricated a 12-inch single-stage op-tic...
MEMS technolgies can provide future space missions with ultra light-wight and high resolution optics. We conducted an X-ray irradiation test of our first MEMS-based Wolter type-I optic. However, a focus was weak and wide spread. Hence, we improved fabrication processes and an alignment system. In this paper, we report on results of the latest X-ray irradiation test of our new Wolter type-I optic....
We have been developing original MEMS-based X-ray optics toward future astronomical missions such as a planetary exploration mission. In this paper, we report results on the first X-ray irradiation test for a 2-stage MEMS-based optic. The obtained FWHM of the focusing image is 13±2 arcmin. However, an occultation effect and a deformation accuracy possibly affect a reduction of effective area.
Low-cost and high-resolution X-ray optics based on MEMS technologies is proposed and being developed by our group. We have succeeded in soft X-ray imaging using sample optics. However, roughness of the side walls etched through a thin silicon wafer, which are used as X-ray mirrors, limited the image resolution. In this paper, a new process condition is tested in the dry etching process to achieve...
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