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Soft X-ray (SXR) spectra from hafnium and tantalum laser produced plasmas were recorded in the 1–7 nm region using two Nd:YAG lasers with pulse lengths of 170 ps and 10 ns, respectively, operating at a range of power densities. The maximum focused peak power density was 2. 3 × 1014 W cm-2 for 170 ps pulses and 1. 8 × 1012 W cm-2 for 10 ns pulses, respectively. Two intense quasicontinuous intensity...
Over the past 10 years Extreme Ultraviolet Lithography (EUVL) sources based on 13.5nm emission from Sn plasmas have been investigated. Sn plasmas produce strong resonant emission due to 4d–4f, 4p–4d and 4d–5p transitions around 13.5 nm, which overlap in adjacent ion stages to yield an intense unresolved transition array (UTA). The UTA consists of hundreds of thousands of near-degenerate resonance...
We have investigated laser-produced plasmas (LPP) from high-Z elements as sources of soft X-rays. Emission spectra from several high Z LPPs are observed and the dependence of peak wavelength of unresolved transition array (UTA) emission on atomic number is reviewed. We observed that bismuth (Bi) has strong UTA emission centered at 4 nm, inside of the water window. The effect of laser power density...
We have demonstrated that the terahertz radiation can be generate by the burst current produced by a laser created ionization front, which is induced an optical-field-induced ionization in air with a pulsed electric field. The peak frequency of the radiation spectrum depends on the rise time of the OFI. The central frequencies of the radiation are observed to be 0.2 and 0.04 THz at the pulse durations...
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