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We report an approach to design spring constant arranged for MEMS accelerometers fabricated by multi-layer metal technology. The proposed multi-layer metal structure can control the spring constant of serpentine flexure to suspend high-density proof mass. Moreover, the multi-layer metal configuration enables us to obtain high degree of freedom of spring constant design without compromising the performance...
We report experimental evaluation results of a CMOS (complementary-metal-oxide semiconductor)-MEMS (microelectromechanical systems) accelerometer for sensing sub-1G (1G = 9.8 m/s2) acceleration. The sub-1G MEMS sensor has been successfully implemented on a 180-nm CMOS LSI (large scale integrated circuits) for the first time. For the MEMS fabrication, we utilized multi-layered metal technology for...
This paper reports a novel dual-axis MEMS inertial sensor that utilizes multi-layered electroplated gold. All the MEMS structures are made by gold electroplating that is used as post-CMOS process. Due to the high density of gold, the Brownian noise on the proof mass becomes lower than those made of other materials in the same size. The miniaturized MEMS accelerometer can be integrated in an arrayed...
We present a novel electrical impedance sensor for measuring the resealing time of porated mammalian plasma membranes. Openings were generated by high speed cavitation bubbles using laser pulsing of metallic microdisks on transparent ITO electrodes. Real-time impedance measurements show that membrane resealing time and impedance recovery takes 1 to 2 minutes after laser pulsing. Our method can also...
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