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Record breaking RF performance was recently achieved on a 65nm CMOS technology (29nm Lgate, 210nm pitch) employing uni-axial strained silicon transistors. These highest-reported cutoff frequencies for NMOS transistors achieve fT/fMAX values of 360 GHz/420 GHz. PMOS transistors also demonstrate superior performance with fT/fMAX values of 238 GHz/295 GHz. Varactor performance on this substrate technology...
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