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We present a novel approach for 3D microstructuring of amorphous soft magnetic alloys. Our unique process is MEMS-compatible and leaves the magnetic properties of the alloys intact. The applicability of the process has been demonstrated in the fabrication of closed-loop core microtransformers. The magnetic core is fabricated using Metglas 2714A, cobalt-based magnetic alloy. The microtransformers show...
We report on a novel micro-fabricated probe for nuclear magnetic resonance (NMR), based on two 1.5 mm diameter copper micro-coils, which are arranged in a Helmholtz configuration. The probe features a U-shaped slit opening to accommodate a sample and to precisely align it with respect to the sensitive, homogenous magnetic volume of the Helmholtz-pair. For liquids and suspensions, custom fabricated,...
We present the fabrication of 3D-microtransformers combining a new type of multilayered magnetic core and coil winding with an automatic wirebonder. For the magnetic cores we stapled up to 30 layers of 20 μm thick amorphous metal layers with an industrial laminator. Intermediate layers of 10 μm thick double-sided sticky tape provided adhesion and electrical insulation. Electrical discharge machining...
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