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Stress engineering in multilayered thin-film patterns is the key to control the diameter of self-rolled magnetic structures. Arrays of magnetic microtubes were fabricated via a deterministic release of rectangular thin-film patterns of Ti(20 nm)/Ni(30 nm)/Au(2 nm) and Ti(20 nm)/GaFe(40 nm)/Au(15 nm) from a sacrificial underlayer of Cu. It is demonstrated that the expansion of the anodized Ti layer...