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In this work, we report design, fabrication and characterization of a 3-D scanning micro-mirror device that combines 2-D beam scanning with focus control in the same device using micro-electro-mechanical-systems (MEMS) technology. The micro-mirror consists of a biaxial gimbal structure for 2-D beam scanning, and a deformable mirror membrane surface to achieve focus control. The micro-mirror with 800...
We demonstrated generation of various optical trap spots using a MEMS scanning micromirror with optical tweezers. By controlling the actuation voltage pattern, various focused laser lines and separate laser spots were achieved.
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