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A silicon carbide based field effect transistor (SiC-FET) structure was used for methanol sensing. Due to the chemical stability and wide band gap of SiC, these sensors are suitable for applications over a wide temperature range. Two different catalytic metals, Pt and Ir, were tested as gate contacts for detection of methanol. The sensing properties of both Ir gate and Pt gate SiC-FET sensors were...
SiC based Field Effect Transistor gas sensors with Pt as gate material have previously been shown to exhibit a binary CO response, sharply switching between a small and a large value with increasing CO or decreasing O2 concentration or temperature. In this study Pt gates with different structures have been fabricated by dc magnetron sputtering at different argon pressures and subjected to various...
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