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A Thin-film spiral antenna coupled with Bi microbolometer operating at 200 GHz band was fabricated on Si3N4/SiO2 membrane. The experimental antenna patterns agreed well with theoretical ones, and wide band characteristic of the antenna ranging from 140 to 220 GHz was obtained.
A VOx microbolometer detector coupled with thin-film spiral antenna was fabricated by metal-organic decomposition. Temperature coefficient of resistance of the microbolometer was 4.7 %/K at 300 K and the responsivity was 120 V/W for 94 GHz electromagnetic wave radiation at a bias current of 0.5 mA.
VOx thin films were fabricated on fused quartz substrates by metal-organic decomposition. In R-T characteristics, VOx films indicated an abrupt phase transition around 52°C with a resistivity change of 3–4 orders and temperature coefficient of resistance of 4.4–4.8 %/K at 300 K.
A thin-film spiral antenna with Bi microbolometer was fabricated on a fused quartz substrate. Detected voltages of the antenna at 94 GHz exhibited a periodic variation with changing the substrate thickness. Detected voltages were almost constant within the change of ∼3 dB at 76.9–106.8 GHz.
A thin-film 2-arm spiral antenna with Bi microbolometer operating at 100 GHz band was fabricated. In the video detection, detected voltages, which were proportional to the power of signal wave at 94 GHz and a bias current, were obtained. DC sensitivity of the microbolometer was about 35 W-1.
Well axis-oriented V2O5 thin films were fabricated by MOD. V2O5 films were reduced to VOx films under a temperature of 530°C and pressures of 1.2-3.0 Pa in O2. VOx films indicated an abrupt transition around 55°C with a resistivity change of 3 orders and TCR of 2.1-2.2 %/K at 300 K.
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