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This paper presents the experimental evaluation of a new piezoresistive microelectromechanical systems strain sensor. The sensing chip is highly capable of measuring biaxial state of strain/stress. The sensing elements are p-type piezoresistors on (100) single crystal silicon aligned along [110] and its in-plane transverse. The concept of introducing geometric features to enhance the sensor sensitivity...
In this article, the design of a MEMS-based strain sensor has been introduced. This design has high sensitivity, low power consumption compared with the commercially available thin-foil strain gauges, and high absolute resolution. All of these are at high signal stability over a wide temperature range. The piezoresistivity theory, the microfabrication process flow and the finite element simulation...
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