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This paper presents how a bearingless motor with exterior rotor can be implemented successfully in high-purity mixing applications. Important design parameters are identified and their influence on the system performance is demonstrated. The mechanical setup, the principle of bearing force and torque generation, the power electronics, the closed-loop control and the cooling concept are introduced...
This paper presents a non-invasive closed-loop flow control system in a compact design for high-purity or aggressive chemical applications. The novel topology with a solenoid activated valve and ultrasonic-based flow measurement permits precise flow control with rapid response time at a very low price. In the paper the mechanical setup, the power electronics, the implemented closed loop control as...
In the semiconductor industry, where bearingless pump systems are employed as the state-of-the-art technology, the trend goes toward higher fluid temperatures (150degC and more) in order to further increase process efficiency. This fact translates into the requirement of a high-temperature bearingless pump system and/or the elimination of thermal-critical components such as Hall sensors. This paper...
In semiconductor industry, where bearingless pump systems are employed already as state-of-the-art technology, the trend goes towards higher fluid temperatures (150degC and more) in order to further increase process efficiency. This fact translates to the requirement of a high.temperature bearingless pump system and/or the elimination of thermal-critical components such as hall sensors. This paper...
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