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The process of formation of cold cathodes on the basis of carbon nanotubes synthesized in porous anodic alumina has been developed. Integral and local field emission (FE) measurements of produced cathodes have been performed. Main FE parameters: onset field, field enhancement factor and current capability of certain emitters have been measured.
Thin nanoporous alumina films were grown on n-type Si wafers by anodizing sputtered-deposited Al/Ti layers to prepare matrix of metal oxide catalysts with contact interface - Al2O3/TiO2/Ti/n-Si for later synthesis of carbon nanotubes (CNTpsilas) in the alumina pores. CNTpsilas were grown by CVD in the presence of ferrocene catalyst. Measurements of field emission properties of the CNTpsilas in anodic...
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