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This paper reports on a generic approach for the development of polysilicon diodes on glass wafers for thermal sensing and control applications. The capabilities of polysilicon diodes as thermal sensors are demonstrated on glass wafers with good thermal sensitivities about 40 mV/degC. A simple experimental set-up has been developed to evaluate the potentialities of these devices in microfluidics operating...
This paper reports on the design and fabrication of integrated thermal sensors or thermal sources for various MEMS applications and particularly microfluidics applications. The capabilities of polysilicon diodes as thermal sensors are demonstrated with good thermal sensitivities (55 mV/degC). An instrumentation platform has also been developed to measure the temperature variations through microchannels.
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