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We have fabricated ultra-narrow (sub-10 nm) short channel (100 nm) silicon (Si) nanowire transistors with atomically flat interfaces based on Si-on-Insulator (SOI) substrates. The raised source and drain electrodes were patterned together with the gate electrode. The smaller threshold voltage in the narrower nanowire suggests self-limiting oxidation during the gate oxide formation.
A low-power 2Mb ReRAM macro was developed in 90 nm CMOS platform, demonstrating lower power data-writing (x1/7) and faster data-reading (x2∼3) as compared to a conventional flash. The memory window at −6σ for 10 years was confirmed with a high-speed 1-bit ECC considering operating temperature ranging from −40 to 85 °C, where the worst conditions are high-temperature (85°C) “Off” writing and low-temperature...
A low-power 2Mb ReRAM macro was developed in 90 nm CMOS platform, demonstrating lower power data-writing (x1/7) and faster data-reading (x2∼3) as compared to a conventional flash. The memory window at −6σ for 10 years was confirmed with a high-speed 1-bit ECC considering operating temperature ranging from −40 to 85 °C, where the worst conditions are high-temperature (85°C) “Off” writing and low-temperature...
A novel cylinder-type metal-insulator-metal (MIM) capacitor in porous low-k film (CAPL) is proposed for embedded DRAMs (eDRAMs). The CAPL removes long bypass-contacts (BCT) with high resistance, which have been used to connect transistors with Cu interconnects by way of the MIM capacitor layer. A key technical challenge for the CAPL integration is control of pore structure in the low-k film to avoid...
We developed a photopatternable ionic gel to make soft microactuators driven at low voltage under atmosphere. A prototype of microactuator using the photopatternable ionic gel was produced and driven by applying voltage of below plusmn1.5V under atmosphere. The driving performance of the microactuator was examined experimentally. The maximum displacement of the actuator was proportional to input voltage...
This paper concerns a novel method of minimizing loss and stabilizing fusion splicing performance under any atmospheric conditions. A feedback loop is used to relate the luminosity of the splice with arc current and time.
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