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This work aims at demonstrating potential benefits of applying nonlinear control techniques to electrostatic micromirrors in order to extend their stable operational range and enhance the system's performance. A nonlinear tracking control based on feedback linearization and trajectory planning has been developed. Aspects essential to the implementation of such a system, such as prevention of the device...
This paper is aimed at demonstrating the potential benefits of applying nonlinear control techniques to a type of microelectromechanical system, namely, electrostatic micromirrors, in order to extend their stable operation range, enhance the system's performance, and allow controller tuning and system operation to be performed in a systematic manner. A nonlinear tracking control based on feedback...
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