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Active control of phase-sensitive interferometric metrology systems is necessary for low noise, high resolution, high bandwidth, and parallel operation. Conventional active control methods have several drawbacks like low SNR, high complexity, and low bandwidth. With the development of micromachined scanning grating interferometers ( muSGIs), high-bandwidth parallel active control of an array of interferometers...
Micro scanning grating interferometer (muSGI) is a micromachined optical sensor to inspect MEMS. This paper presents the design, fabrication, implementation and analysis of an array of such muSGIs. The muSGIs are capable of static and dynamic displacement measurements. The muSGIs have phase sensitive micromachined gratings which are actuated by electrostatic force. The muSGIs are fabricated on SOI...
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