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The impact of acceleration and vibration loads on a piezoresistive pressure sensor and its packaging components is investigated in some detail. For the sake of definiteness, sensor operation conditions in a helicopter rotor blade are considered. There, the sensor chip is loaded with static high-g accelerations up to 1000g and vibrations up to 10g. The sensor diaphragm, the chip adhesive and the bond...
We investigate the acoustic behavior of a screen-protected MEMS pressure sensor in particle-contaminated environments. An acoustic model of the sensor housing taking into account the number of openings is derived and verified with microphone measurements. It is shown that the real viscous resistance is more than two times higher than theoretically predicted by the Poiseuille flow model. Thus, a realistic...
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