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The electron temperature (T e ) in an electron cyclotron resonance plasma is clarified to depend on the spatial profiles of the microwave-power absorption by both the electromagnetic-waves measurement and the simulation of microwave power absorption. It is found that T e is controlled by varying the magnetic field configuration and/or the microwave frequency since the power absorption...
The nitrogen molecular dissociation level in 915 MHz ECR plasma was evaluated as a function of the electron temperature by optical emission spectroscopy. The intensity ratio of N line to N 2 line, which provides information on changes in the degree of dissociation of nitrogen molecules, was found to increase monotonously from 0.01 to 0.07 with increasing the electron temperature from 2 to...
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