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Magnetic-catalyzed SnO2 with Fe3O4 of CMOS MEMS gas sensor is proposed and it's based on the magnetic-catalytic sensing mechanism to increase sensitivity. Beyond the conventional power dissipation of heating to maintain a certain working temperature, a new approach for gas sensor with magnetic-catalytic mechanism works at the ambient temperature without the consideration of active heating. The design...
A new proposed gas sensor was built to achieve high field with the tip type electrode in a standard CMOS process. The increase of electric field will enhance the chemical reaction rate dramatically. Beyond the conventional chemical sensors with heating power to achieve a high sensitivity, we proposed a total new sensing mechanism with the short distance of electrodes which includes the different distance...
Beyond the conventional chemical sensors with heating power, we proposed a total new magnetic-catalytic sensing mechanism without heating which includes the original sensing material and also magnetic-catalytic with even higher sensitivity than before. A magnetic material in sol-gel method and a prepared solution of sol-gel SnO2 is mixed at SnO2 : Fe3O4 = 3 : 1. The samples with several pH conditions...
A CMOS micromachined gas with advantages of CMOS standard process and high sensitivity is presented in this paper. The proposed gas sensor was built with array of floating membranes and serially connected over an etched cavity. Finger type electrodes are built for sensing the resistance of coated sensor material. A proposed highly integrated multi-layer structure of electrodes is formed with metal/via...
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