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This paper describes a millimeter-sized electret vibrational energy harvester fabricated by a MEMS-based process for power generation enhancement. To increase current generation, we developed a new “slit-and-slider” structure with horizontal arrays and vertical protrusions. This structure enables us to increase an area and to narrow a gap of energy conversion in the limited size. The structure was...
This paper presents experimental proof of energy harvesting with MEMS-based vibrational devices. To clarify the effect of the coupling of vibration of MEMS devices and electrical field of electrets for current generation, a slit-and-slider structure was developed. This structure enables to combine the MEMS devices and electrets after their vibrational and electrical properties have been characterized...
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