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Master/slave control of a dual-stage for precision positioning with application to IC production is presented. Configuration and work principle of ultra precision positioning stage are pictured. By adopting merits of both coarse and fine stage, a desired motion control system having the capacity of large workspace with high resolution of motion is enabled. Identification method of mechatronics system...
Quantitative feedback control of a linear positioning stage with cogging force compensation is presented. Positioning stage direct-driven by linear motors commonly suffers from significant mechanical resonances at high acceleration rates. Which is solved by using a tracking control scheme based quantitative feedback theory (QFT). Cogging force deteriorates significantly positioning accuracy and tracking...
Compliant force control in space docking is studied. Compliant force control strategy is developed based on the inner loop position control of 6-dof parallel robot in order to simulate push and pull process of forcible alignment in space docking. Compliant force control structure based on the inner position loop is introduced. The more systematic design methods of a serial PID type controller and...
Dynamics simulation system containing position control loop is studied for simulating dynamics process of space docking on the ground. Working principle of the combined general dynamics test platform is pictured. Equivalent dynamics simulation problem with space docking simulation is put forward conceptually. Stability analysis and reasonable configuration of physical parameters of dynamics simulation...
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