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In this paper, a mode matching control loop is suggested for the matching of the resonant frequency of the sensing mode with that of the driving mode. Matching of two modes is critical issue of the MEMS vibratory gyroscope to achieve the high sensitivity of the sensor. A new mode matching control loop using the concept of phase locked loop (PLL) is proposed and analyzed. Through the computer simulation...
In this paper, we present a novel approach for self-sustained resonant accelerometer design, which takes advantages of an automatic gain control to implement a uniform oscillation dynamics. For the system modeling and loop transformation, an envelope based state space approach is taken. The paper also presents the application of the designed accelerometer for an integrated gyroscope and accelerometer...
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