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We propose a new two‐axis electromagnetic scanning mirror that utilizes radial magnetic fields. By positioning magnets under the mirror, we were able to develop a greatly miniaturized mirror device. This device's volume is 300 mm3. Moreover, the mirror driving magnetic induction can be enlarged by forming a closed magnetic field with the yoke and the magnets. To assemble it easily, the upper part...
This paper presents an electro-thermal microactuator for a dual stage actuation scheme. The size of the microactuator is 1.5×1.3×0.3 mm3. Power consumption was 5.8mW when the applied voltage was 3.5+/−3.5V from DC to 100 kHz. The resonant frequency was designed to be 36 kHz, and the achieve value was 33 kHz. We also developed a frequency response model of this microactuator and found that our model...
This paper describes the fabrication technology of a new MEMS-based probe card. The probe card is designed to satisfy requirements from advanced wafer-level burn-in LSI tests. The problem of thermal expansion mismatch between the probe card and LSI wafers is solved by using a LTCC (low temperature cofired ceramics) substrate with a coefficient of thermal expansion of 3.4 ppm/degC The probes are first...
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