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A custom-built gas cluster ion source with an energy up to 20 keV is constructed. Ar, CO2, N2, and O2 are used as the working gases. The clusters are formed by metal conical nozzles with critical diameters of 65−135 um and a cone angle of 14°. To facilitate evacuation of the chambers we use the pulse mode of nozzle feeding. This allows an increase in the gas pressure in the stagnation zone (inlet...
The principles of constructing a sputtering-type high-current source of homogeneous and heterogeneous cluster ions are comprehensively analyzed. The results of analysis are used to perform computer simulation of the given source. The ion-optical scheme and structural model of a new cluster ion source are developed.
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