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The chemical shift of SiOC film was observed according to the flow rate ratio. SiOC film has the broad main band of 880~1190 cm-1 and the sharp Si-CH3 bond at 1252 cm-1, and the infrared spectra in the Si-O-C bond moved to low frequency according to the increasing of an oxygen flow rate. The chemical shift affected the carbon content in the SiOC film, and the decreasing of carbon atoms elongated the...