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An ultrasonic measurement technique has been proposed for ghost suppression with a sparse phased array by using multiple frequencies. A sparse phased array with an inter-element spacing over a half wavelength causes large grating lobes resulting in ghosts. In the proposed method, the ghosts have been effectively suppressed by combining with a lower frequency measurement on the same array. This method...
Tactile array sensor of the micro-cantilevers embedded in the elastomer has been fabricated to detect normal and 2-axes shear stresses. It is demonstrated that tactile array sensor with 3 times 3 detective elements can be fabricated with excellent yield. The sensor element is sensitive to both normal and shear stresses applied on entire sensor surface. Moreover, it has good directional characteristics...
A simple signal processing method has been proposed for ultrasonic position measurement using resonant microsensors. Micro-fabricated sensors have a high quality factor of mechanical resonance and the high Q-value realizes a high sensitivity, but also causes a long tail of dumping oscillation in a response waveform against a ultrasound pulse. The proposed method reveals pulse arrival points in superposed...
This paper reports the development of an arrayed device, which can act as both transmitter and receiver for ultrasonic pulses in the air. The device is composed of micromachined capacitive structures with parylene diaphragms, each of which can generate large sound pressure and realize high sensitivity based on the non-brittle and flexible characteristics of polymer parylene. By setting a delay time...
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