The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this paper, charge decay of PECVD SiO2/Si3N4 double layers electrets with different thicknesses of Si3N4 under different environmental conditions was investigated. Single layers of PECVD prepared SiO2 and Si3N4 were also studied. Double layers electrets exhibits better charge stability than single layer under different conditions. As for the double layers with 2 nm-100 nm Si3N4, their charge stability...
SiO2/Si3N4 double layers electrets have been investigated for their long-term charge stability and compatibility to micro technology. This paper first reports SiO2/Si3N4 double layers electrets both prepared by plasma enhanced chemical vapor deposition (PECVD) on glass substrates. Charging time, charging temperature and annealing process were studied for their influence on electrets properties. Different...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.