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This paper presents a new method for making three-dimensional structure on the surface of an elastomer substrate. In general, micromachining based on lithography process is layer-by-layer fabrication, and the resulting structure is restricted to be two-dimensional. In this paper, we presented that three-dimensional structures were achieved by attaching a thin film partially onto an elastomer. Under...
This paper presents a surface structuring method for a closed micro channel. Because fine photolithography can only be made on a flat surface, it has been difficult to make complicated patterns on the inside walls of non-planar microfluidic channels. Here, we demonstrated that micro-scale hierarchical patterns can be formed on the inside walls of the micro channel simply by depositing a plastic thin...
We propose an optical device which appends pan/tilt functions to cameras by moving mirrors with electrowetting force. The device is composed of two plates and a liquid pillar holding two mirrors. On the lower plate, electrodes are patterned and a hydrophobic layer is coated. When a voltage is applied to the electrode on the lower plate, the liquid is moved toward the electrode by electrowetting force...
This paper presents a micro liquid prism. Two flat transparent plates float on a liquid droplet and these plates serve as prism faces. The two plates are positioned automatically by surface tension, just by putting the plates on the ellipsoidal droplet. Therefore the proposed prism can be fabricated accurately in micro scale without difficulty. As the liquid and the plates are encapsulated by Parylene,...
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