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This paper reports on the development and evaluation of various multi-probes consisted of silicon cantilevers with different types of tips made of platinum, ruthenium, chromium and diamond for probe-based ultra-high-density ferroelectric data storages beyond 1 Tbit/inch . The metal probes can write and read the data bits on a medium with contact operation. We performed wear tests on the various tips...
A mirror device for an external cavity diode laser is fabricated. To achieve a wide and continuous tuning range, mechanical linkage of two parallel rotation axes can rotate and translate the mirror, generating a virtual pivot point of the mirror motion. This mirror device is realized using a wafer-folding technique
Integration of a grating-image-type encoder is proposed and the sensor for the encoder has been fabricated using Si micromachining technology. The sensor consists of the Si grids with line photodiodes, light emitting diode (LED) and signal amplifier. The Si grids works as the photodetectors as well as the object and index gratings. The incoherent light emission through the Si grids and the light detection...
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