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The advent of the cable-less lightpipe radiation thermometer (CLRT) has resulted in a significant improvement in the accuracy of CLRT calibrations and measurements. CLRT systems show great promise in noncontact measurements by the elimination of the uncertainties caused by the long fiber optic cables and their connections and by the extension of the spectral range to handle low temperature applications...
A new capability for the measurement of the temperature-dependent emittance of specular samples in the near infrared spectral region has been developed in NIST's infrared spectrophotometry laboratory to provide emittance measurements and standards for a broad range of applications including rapid thermal processing (RTP). Our approach employs the indirect measurement of reflectance and transmittance...
The advent of the cable-less lightpipe radiation thermometer (CLRT) has resulted in a significant improvement in the accuracy of lightpipe radiation thermometer calibrations and measurements. CLRT systems show great promise in noncontact measurements by the elimination of the uncertainties caused by the long fiber optic cables and their connections and by the extension of the spectral range to handle...
Since pyrometric thermometry is a noncontact method, it has great promise as a technique for monitoring silicon wafers during rapid thermal processing (RTP). Absolute values of surface emissivity are required when making pyrometric temperature measurements. One approach to obtaining these values is the use of emissivity compensated pyrometry, where a reflectometer is integrated into the pyrometer...
Many rapid thermal processing (RTP) tools are currently monitored and controlled with lightpipe radiometers (LPRTs), which have been limited to measuring temperatures above 500degC because of the low signal level below 500degC. New commercial LPRTs couple the optical detector directly to the lightpipe, eliminating the signal loss from optical cables. These cable-less light pipe radiometers (CLRTs)...
Advances in microelectronics led to the development of rapid thermal processing (RTP). Accurate in situ temperature measurement and control are crucial for RTP furnaces to be largely accepted in the fabrication of semiconductor chips. This paper describes an effective emissivity model based on the Monte Carlo method to facilitate radiometric temperature measurements. The results showed that for non-diffuse...
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