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The paper presents the replicas for various patterns (dots, lines, prism and lens) obtained in polymethylmethacrylate (PMMA), epoxy resin and polydimethylsiloxane (PDMS) in different conditions for polymer coating. By properly understanding of the all factors affecting the process, we follow to improve the quality of the replicas and to apply the replica molding in micro/nanofabrication of the components...
In this paper we have investigated the molding and release parameters required for three- dimensional micro/nanofabrication in order to optimize the process and to apply it in the fabrication of micro/nano photonic structures. The replicas for various patterns (dots, lines, prism and lens) were obtained in polymethylmethacrylate (PMMA), epoxy resin and polydimethylsiloxane (PDMS) in different conditions...
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