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Poly(methyl methacrylate) (PMMA) was pulsed laser deposited at a wavelength of 248nm using different laser fluences between 30 and 9000mJ/cm 2 . While the composition of the films obtained after deposition at high laser fluences is close to that of the target, the molecular mass of the film material is reduced to about M w =8000g/mol due to incubation processes independent on the high...