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Micro-Electro-Mechanical Systems have been growing rapidly over recent years. However, measurement of their motions is a difficult problem. A laser Doppler interferometric system for measuring motion characteristics of vibrating combs in MEMS is presented. The working principle and optical diagram of the system are explained. Some key challenges in the system design are discussed. The velocity, displacement,...
The distances between the balls of a ball array used in machine geometry calibration have to be very accurate. These distances can be calibrated using a laser measurement system, which requires specially designed optical devices and measuring probes. In this paper, a new and economical alternative method for calibrating the ball array is described. A single gage block is used for measuring the...
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