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This paper presents a MEMS switchable optical delay line, which works at terahertz (THz) region. The geometry of the unit cell is tunable by MEMS actuators [1]. In the experiment, it measures that the round trip time of the 5-µm silicon-metal cavity with the metamaterial slab is delayed by a factor of 100 when the gap of the metamaterial unit cell is shifted from 4 µm to 8 µm. Compared with the traditional...
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