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Microchannel plates (MCP) fabricated from standard silicon wafer substrates using a novel silicon micromachining process, together with standard silicon photolithographic process steps, are described. The resulting SiMCP microchannels have dimensions of ∼0.5 to ∼25μm, with aspect ratios up to 300, and have the dimensional precision and absence of interstitial defects characteristic of photolithographic...