The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
In this paper, the eddy current method is used for measuring the thickness variation of Cu layer during chemical mechanical planarization (CMP) process. And an in-situ measurement system has been developed. A series of experiments have been done on the Universal-300 CMP system for evaluating the feasibility and reliability of the in-situ measurement system, and the accuracy of the system is presented...
In this paper, a data mining method is proposed to modeling the nonlinear system with constraints based on the sample data. The nonlinear system is expressed as a dynamic fuzzy system with modeling uncertainties. A robust receding horizon control scheme is proposed to stabilize the nonlinear system. The Min-Max optimal control problem arising in the robust receding horizon control is solved by the...
Here, two matrix iterative methods are proposed to solve general coupled matrix equations, based on Paige's algorithms as the framework. By these new iterative methods, we can get the minimum Frobenius norm constrained solutions, such as symmetric, generalized bisymmetric and (R, S)-symmetric solutions.
Multi-agent system (MAS) is a set of intelligent agents which can perform common tasks by communicating, cooperating and collaborating with each other. It has the abilities of self-organization, self-learning and self-reasoning. In recent years, MAS is one of the hot researches in the field of distributed artificial intelligence. It is widely used in various aspects of the social field and provides...
With the development of tidal current power generation technology, the research on developing of detection and control system, which is suitable for the energy conversion of tidal current generation, is becoming an important component of developing tidal current energy. The paper introduces the basic composition of tidal current power generation system, as well as the detection and control technology,...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.