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A CMOS micro fluxgate sensor, including device design, manufacturing process and harmonic frequency characterizations, is described in this paper. The single-axis device is designed in a planar coil structure with a ferromagnetic core featuring low saturation magnetic induction of 10μT. The chip is measured 2.08 mm × 1.29 mm and fabricated by TSMC CMOS 0.35μm 2P4M process. The miniature magnetic core...