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We developed a capacitive silicon on insulator (SOI) microelectro-mechanical systems (MEMS) tuning-fork gyroscope and describe its structure and performance.
A thin film lead zirconate titanate Pb(Zr,Ti)O3 (PZT), energy harvesting MEMS device is developed to enable self-supportive sensors for in-service integrity monitoring of large social and environmental infrastructures at remote locations. It is designed to resonate at specific frequencies of an external vibrational energy source, thereby creating electrical energy via the piezoelectric effect. Our...
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