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In this article, the glassy carbon molds using hydrogen silsequioxane (HSQ) patterned by electron beam lithography (EBL) as O2 dry etching mask was fabricated. The use HSQ pattern written by EBL for O2 etching mask showed that the pattern is available for use in an etching mask to O2 plasma.
The Adaptive Power System Stabilizing (APSS) has been developed. This system evaluates the transient responses for each ground fault point and the operating point of the power system by bus-to-bus phase, to obtain an optimal set of tuning parameters for APSS. When the operation point changes with a great amount, the tuning parameters will be readjusted by on-line operation. Simulation of the 16-machine...
In this paper we report a silicon solar-cell array to generate voltage (about 4.8 V by 16 series PIN diode) to drive cantilever actuators made of stress-controlled combination of chromium-gold-chromium layers for electro-thermal pull-up and electrostatic pull-down motion. The silicon PIN layer was developed by the epitaxial growth on an SOI (silicon-on-insulator) wafer. The metal cantilever actuator...
Cu(In/sub 1-x/,Ga/sub x/)Se/sub 2/ (CIGS)-based thin film solar cells have been fabricated using transparent conducting oxide (TCO) back contacts allowing light to pass through the entire solar cell structure. The cell performance of CIGS devices using tin oxide (SnO/sub 2/) and indium tin oxide (ITO) back contacts were almost the same as that of a conventional CIGS solar cell fabricated using a Mo...
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