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Aluminum nitride thin-film bulk wave resonant pressure sensors employing - and tilted -axis texture, have been fabricated and tested for their pressure sensitivities. The -axis tilted film bulk acoustic resonators pressure sensors demonstrate substantially higher-pressure sensitivity compared to its -axis oriented counterpart. More specifically, the thickness plate quasi-shear resonance has demonstrated...
The piezoresistive properties of single-crystalline silicon nanofilms are studied. Resistors were fabricated on 130nm thick SOI-silicon and measurements indicate that the conductivity is extremely sensitive to substrate bias and can therefore be controlled by varying the backside potential. Another important parameter is the resistivity time drift. Long time measurements show a drastic variation in...
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