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This paper presents a Pirani vacuum gauge based on a micro-hotplate (MHP) supported by six unequal beams. The MHP is fabricated using surface silicon micromachining technique. A thermal model for the gauge is established by means of Fourier analysis, which takes account of internal heat source in the beams and pressure-dependent gaseous heat conduction above and below the MHP. It is applied to determine...
A micro-hotplate (MHP) based Pirani gauge is fabricated using surface-micromachining technology and measured with a typical constant temperature circuit. The measured results show that its sensitive range is at least 10-105 Pa and can be widen when increasing working temperature. According to Fourier method and energy conservation law, heat conduction differential equations of the supporting beams...
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